KFD Series Tape Polishing Unit for Semiconductors
Renewed functionality and design! Enhanced functionality while maintaining the basic performance!
In the semiconductor industry, as devices become more densely packed, the flatness of substrates and wafers becomes extremely important. Surfaces with low flatness can lead to reduced yield in the manufacturing process and degradation of device performance. The KFD series supports the resolution of challenges in the flattening process of semiconductor manufacturing through precise polishing control via PLC control. 【Application Scenarios】 - Flattening of semiconductor wafers - Polishing of thin films - Surface adjustment after CMP 【Benefits of Implementation】 - Easier management of surface roughness - Contribution to yield improvement - Stabilization of device performance
- Company：Kovax Corporation
- Price：Other
